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Scanning thermal microscopy (SThM) is a type of scanning probe microscopy that maps the local temperature and thermal conductivity of an interface. The probe in a scanning thermal microscope is sensitive to local temperatures - providing a nano-scale thermometer. Thermal measurements at the nanometer scale are of both scientific and industrial interest. ==Applications== SThM allows thermal measurements at the nano-scale. These measurements can include: temperature, thermal properties of materials, thermal conductivity, heat capacity, glass transition temperature, latent heat, enthalpy, etc. The applications include: *Ultra large-scale integration (ULSI) lithography research and cellular diagnostics in biochemistry. *Detecting such parameters as phase changes in polymer blends. *Joule heating *Measuring material variations in semiconductor devices *Subsurface imaging〔 *Near-field photo thermal micro-spectroscopy *Data storage *Calorimetry applications〔〔〔Lee, J-H. et al. International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2002),Madrid, Spain, October 2002, pp. 111-116.〕 *Hot-spots in integrated circuits *Low temperature scanning thermal microscopy *Magnetic spectroscopy in combination with the ferromagnetic resonance realized in the SThM-FMR technique *Other applications 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「scanning thermal microscopy」の詳細全文を読む スポンサード リンク
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